Lens Array by Electrostatic Patterning of Dielectric Microspheres in a Parylene-c Well Template
نویسندگان
چکیده
We present the fabrication of a microlens array which can be integrated into a microfluidic device. In the demonstrated technique, a microwell array is firstly fabricated in a Parylene-C layer by a standard cleanroom process. Afterwards, the optically transparent dielectric microspheres with high refractive index are patterned inside the well template by utilizing an electrostatic technique. The mechanism of microsphere patterning is studied, and the lens effect of the microsphere is experimentally verified in a water-based medium. We also present a detailed two-dimensional numerical optical simulation study on the patterned microspheres using the Finite Element Method (FEM).
منابع مشابه
Reliable and low-voltage electrowetting on thin parylene films
a r t i c l e i n f o The stability of an electrowetting system is dependent upon the choice of liquids, the dielectric material and the operating voltage. Substantial progress is reported herein on use of 300 nm thick poly(α, α, α′, α′-tetrafluoro-para-xylylene) (Parylene HT) films for almost 100° of reliable electrowetting modulation at only 15 V. Not only does Parylene HT exhibit improved re...
متن کاملTowards flexible organic thin film transistors (OTFTs) for biosensing
We have studied parylene-N and parylene-C for their use as substrates and gate dielectrics in OTFTs. Parylene-N films with a thickness of 300 nm show the required dielectric properties, as verified by breakthrough-voltage measurements. The surface roughness measured for 300 nm thick parylene-N films is 4–5 nm. However, initial growth of parylene depends on the subjacent surface. This results in...
متن کاملAMPLIFICATION CIRCUITS AND PATTERNING METHODS OF ORGANIC FIELD-EFFECT TRANSISTORS NSF Summer Undergraduate Fellowship in Sensor Technologies
Organic transistor technology holds great promise for creating a conformal, human-safe electronic neural interface. These interfaces must amplify the low, microvolt-range brain signals so they can be utilized in analog and digital applications. Brain signals from sensors must be relayed to the transistor’s gate through the dielectric and semiconductor layers, as well as through an encapsulant w...
متن کاملFast Detection of Single Nanoparticles in a Microfluidic Channel by a Microlens Array in Combination with a Conventional Optical Microscope
We present the use of a microlens array in combination with a conventional optical microscope set-up for the detection of single nanoparticles (NPs) in fluid medium. Optically transparent dielectric microspheres are patterned in a microfabricated well array template and used as microlenses focusing the light originating from a microscope objective into so-called photonic nanojets that expose th...
متن کاملCoherent beam control with an all-dielectric transformation optics based lens
Transformation optics (TO) concept well known for its huge possibility in patterning the path of electromagnetic waves is exploited to design a beam steering lens. The broadband directive in-phase emission in a desired off-normal direction from an array of equally fed radiators is numerically and experimentally reported. Such manipulation is achieved without the use of complex and bulky phase s...
متن کامل